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US Patent Issued to NuFlare Technology on April 21 for "Multi charged particle beam writing method and multi charged particle beam writing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,278, issued on April 21, was assigned to NuFlare Technology Inc. (Yokohama, Japan). "Multi charged particle beam writing method and multi ... Read More


US Patent Issued to Applied Materials on April 21 for "In-situ ion beam angle measurement" (Massachusetts Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,279, issued on April 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "In-situ ion beam angle measurement" was invented b... Read More


US Patent Issued to Applied Materials on April 21 for "Substrate stress management using variable energy and variable dose implantation" (Massachusetts, California Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,280, issued on April 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Substrate stress management using variable energy ... Read More


US Patent Issued to SAMSUNG ELECTRONICS on April 21 for "Filament alignment device" (South Korean Inventor)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,281, issued on April 21, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Filament alignment device" was invented by... Read More


US Patent Issued to Carl Zeiss MultiSEM on April 21 for "Multi-beam charged particle system and method of controlling the working distance in a multi-beam charged particle system" (German Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,282, issued on April 21, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany). "Multi-beam charged particle system and method of... Read More


US Patent Issued to Lam Research on April 21 for "Control of pulsing frequencies and duty cycles of parameters of RF signals" (California Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,283, issued on April 21, was assigned to Lam Research Corp. (Fremont, Calif.). "Control of pulsing frequencies and duty cycles of paramete... Read More


US Patent Issued to Lam Research on April 21 for "Adjustment of power and frequency based on three or more states" (New York, Ohio Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,284, issued on April 21, was assigned to Lam Research Corp. (Fremont, Calif.). "Adjustment of power and frequency based on three or more s... Read More


US Patent Issued to Tokyo Electron on April 21 for "Semiconductor manufacturing apparatus and manufacturing method for semiconductor device" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,285, issued on April 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Semiconductor manufacturing apparatus and manufacturing method for ... Read More


US Patent Issued to Applied Materials on April 21 for "Protection treatments for surfaces of semiconductor fabrication equipment" (Indian, American Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,286, issued on April 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Protection treatments for surfaces of semiconducto... Read More


US Patent Issued to Tokyo Electron on April 21 for "Method for etching film and plasma processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,287, issued on April 21, was assigned to Tokyo Electron Ltd. (Tokyo). "Method for etching film and plasma processing apparatus" was invent... Read More